Measurement requirements
Scan MEMS chip surface 3D shape, extract profile to measure some segments of surface etching on its surface

Key Features Overview
1.Non-contact measurement, integrated design

2. 3D morphology scanning, multi-function data processing
3. A lëu bï ya tɛmɛ në kä juëc yiic

4.Easy luɔ̈ɔ̈i, looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi looi

5. Scanning speed, tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ tɛmɛ

6. ±0.5 to ±1μm repeat precision guarantee

7.Stability, anti-interference capability

Results measurement
A ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye tɛ̈n ye 300 μm

Lɔ̈k kä ye kek yök në tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë

1. A wɛ̈t ye kɔɔr në kä ye kek them
2.Contact measurement, ye kë ye kek tɛ̈n ye kek tɛ̈n ye kek tɛ̈n ye kek tɛ̈n ye kek tɛ̈n ye kek tɛ̈n ye
3. ye tɛ̈n tɔ̈u, tɛ̈n tɔ̈u, tɛ̈n tɔ̈u, tɛ̈n tɔ̈u
4.Measuring speed slow, precision low, measurement error large

5. Structure complex, wëu juëc